Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

Satoru Matsuda, Motoaki Hara, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh, Ken Ya Hashimoto

    研究成果: Article査読

    19 被引用数 (Scopus)

    抄録

    We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO2 for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.

    本文言語English
    論文番号5995226
    ページ(範囲)1684-1687
    ページ数4
    ジャーナルIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    58
    8
    DOI
    出版ステータスPublished - 2011 8

    ASJC Scopus subject areas

    • 器械工学
    • 音響学および超音波学
    • 電子工学および電気工学

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