Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

Satoru Matsuda, Motoaki Hara, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh, Ken Ya Hashimoto

    研究成果: Article

    17 引用 (Scopus)

    抜粋

    We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO2 for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.

    元の言語English
    記事番号5995226
    ページ(範囲)1684-1687
    ページ数4
    ジャーナルIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    58
    発行部数8
    DOI
    出版物ステータスPublished - 2011 8 1

    ASJC Scopus subject areas

    • Instrumentation
    • Acoustics and Ultrasonics
    • Electrical and Electronic Engineering

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