We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO2 for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.
|ジャーナル||IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control|
|出版物ステータス||Published - 2011 8 1|
ASJC Scopus subject areas
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering