Cooperative roles of chemical reactions and mechanical friction in chemical mechanical polishing of gallium nitride assisted by OH radicals: tight-binding quantum chemical molecular dynamics simulations

Kentaro Kawaguchi, Yang Wang, Jingxiang Xu, Yusuke Ootani, Yuji Higuchi, Nobuki Ozawa, Momoji Kubo

研究成果: Article査読

フィンガープリント

「Cooperative roles of chemical reactions and mechanical friction in chemical mechanical polishing of gallium nitride assisted by OH radicals: tight-binding quantum chemical molecular dynamics simulations」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

Physics & Astronomy

Chemical Compounds