Controlling electromigration to selectively form thin metal wires and metal microspheres

Masumi Saka, Kei Kato, Hironori Tohmyoh, Yuxin Sun

研究成果: Article査読

16 被引用数 (Scopus)

抄録

Guidelines for selecting the shape formed by metal discharged from a narrow A1 line were developed. By controlling electromigration in the line, either relatively large microspheres, thin wires, or relatively small microspheres could be formed. Our starting point was a passivated polycrystalline A1 line with a slit and small holes at the anode end of it. In the discussion, we describe how the temperature of a part of a wire, T*, at the moment when the part is completely discharged from the hole, affects the shape of the microstructural feature formed from the metal. High, intermediate, and low values of T* were found to correspond to the formation of large microspheres, thin wires, and small microspheres, respectively. The experimental results are explained in the discussion.

本文言語English
ページ(範囲)3122-3128
ページ数7
ジャーナルJournal of Materials Research
23
11
DOI
出版ステータスPublished - 2008 11 1

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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