Control performance of interactions between reactive plasma jet and substrate

Hideya Nishiyama, Takehiko Sato, Shota Niikura, Genta Chiba, Hidemasa Takana

研究成果: Article査読

1 被引用数 (Scopus)

抄録

When a nonequilibrium Ar/N2 plasma jet is impinging onto a substrate, the effects of operating pressure, applied magnetic field on the radiation intensity from nitrogen radicals, heat flux into the substrate, behaviors of the plasma jet impinging onto the substrate are experimentally clarified. The constant-value control of radiation intensity, substrate heat flux, jet axis deviation, and jet width fluctuation is achieved for high-quality material processes by a proportional plus integral (PI) control method with the suppression of the unstable fluctuarion of plasma jet.

本文言語English
ページ(範囲)8085-8089
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
45
10 B
DOI
出版ステータスPublished - 2006 10 21

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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