When a nonequilibrium Ar/N2 plasma jet is impinging onto a substrate, the effects of operating pressure, applied magnetic field on the radiation intensity from nitrogen radicals, heat flux into the substrate, behaviors of the plasma jet impinging onto the substrate are experimentally clarified. The constant-value control of radiation intensity, substrate heat flux, jet axis deviation, and jet width fluctuation is achieved for high-quality material processes by a proportional plus integral (PI) control method with the suppression of the unstable fluctuarion of plasma jet.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 2006 10 21|
ASJC Scopus subject areas
- Physics and Astronomy(all)