Control of geometry in Si-based photonic nanostructures formed by maskless wet etching process and its impact on optical properties

Yusuke Hoshi, Takeshi Tayagaki, Takanori Kiguchi, Noritaka Usami

研究成果: Article査読

9 被引用数 (Scopus)

フィンガープリント

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Engineering

Physics

Material Science

Computer Science