Continuous wave infrared laser deposition of organic thin films

Seiichiro Yaginuma, Jun Yamaguchi, Masamitsu Haemori, Kenji Itaka, Yuji Matsumoto, Michio Kondo, Hideomi Koinuma

研究成果: Article査読

8 被引用数 (Scopus)

抄録

We developed a continuous-wave infrared laser molecular beam epitaxy (CW-IR-LMBE) optimized for the fabrication of organic semiconductor films. The crystal quality of these organic thin films deposited by CW-IR-LMBE was substantially the same as those deposited by thermal evaporation. Due to the possibility of quick switching of evaporation sources, CW-IR-LMBE is especially advantageous for rapid screening of composition, thickness, and fabrication parameters in materials and device optimization based on combinatorial technology.

本文言語English
論文番号112
ページ(範囲)520-525
ページ数6
ジャーナルJournal of Physics: Conference Series
59
1
DOI
出版ステータスPublished - 2007 4 1
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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