Continuous membrane deformable mirror for adaptive optics using bimorph spring

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

We propose, design and fabricate here a novel electrostatically actuated continuous membrane deformable mirror for the next generation astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A 3.4mm × 3.4 mm deformable mirror with a underlying 4 × 4 electrode array is fabricated by utilizing plasma activated bonding and the subsequent all-dry release process. The fabricated deformable mirror deformed 3.8μm at 130V.

本文言語English
ホスト出版物のタイトル2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ページ598-601
ページ数4
DOI
出版ステータスPublished - 2011 9 1
イベント2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
継続期間: 2011 6 52011 6 9

出版物シリーズ

名前2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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