Construction of 3-D micro structure by multi-face FAB, co-focus rotational robot and various mechanical tools

Y. Hatamura, M. Nakao, T. Sato, K. Koyano, K. Ichiki, H. Sangu, M. Hatakeyama, T. Kobata, K. Nagai

研究成果: Conference contribution

8 被引用数 (Scopus)


In order to manufacture a 3-D micro structure, the following three mechanical methods are newly designed: (1) Multi-face FAB (Fast Atom Beam): The beam, which passed through a hole of a non-contact mask, can pattern-etch on multiple faces of a workpiece by using the intermittent rotation of the workpiece. Because FAB showers straight, the pattern-etching can be performed sharply even on an undulated workpiece where a lithographic contact mask can not draw any pattern. (2) Co-focus rotational robot: The robot's hand has 4 rotational and 3 translational degrees of freedom. Because the rotation axes cross within the microscopic visual area, an operator can execute any micro 3-D task with the rotation under an all-time observation. (3) Mechanical tools: As an end-effector of micro manufacturing machines, the micro mechanical tools are inevitable. In this paper, a vibrating cutting/scraping tool and an air sucking handling tool are developed. In order to confirm the validity of the above concept and the proposed methods, a micro 'Gojunoto (An old Japanese temple tower, 280 × 100 × 100 μm)' was constructed as an example of the 3-D micro structure. Through this construction, it is clarified that the above methods can successfully realize the 3-D micro structure.

ホスト出版物のタイトルAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
出版社Publ by IEEE
出版ステータスPublished - 1994
イベントProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
継続期間: 1994 1月 251994 1月 28


OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学


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