Consistent processing and measurement procedure on micro cutting

Tetsuya Naruse, Kazu Andou, Yutaka Kameyama, Masayoshi Mizutani, Yoshihiro Uehara, Kazutoshi Katahira, Weimin Lin, Chikako Sasaki, Hitoshi Ohmori

研究成果: Paper査読

1 被引用数 (Scopus)

抄録

Miniaturization and weight reduction of portable audiovisual equipments, palmtop computers and mobile phones is being urgently pursued, increasing the demand for miniaturized and highly functional electronic devices, optical devices and mechanical components. A demand for high dimensional accuracy in parts comprising these products is also on the rise. Therefore, tool and processing using it are asked for high accuracy. In this research, we developed the system by which production of micro-tool and processing of work-piece are consistent. It carries an ELID grinding system and measurement equipment on a plane in precision 4-axis processing machine. It became production of a tool with detailed high accuracy is possible, and the deflection of a tool can be suppressed to 30nm.

本文言語English
出版ステータスPublished - 2007 12 1
外部発表はい
イベント4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan
継続期間: 2007 11 72007 11 9

Other

Other4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007
国/地域Japan
CityFukuoka
Period07/11/707/11/9

ASJC Scopus subject areas

  • 産業および生産工学

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