Conditions of micromirror lifted by buckled bridges using film stress

M. Sasaki, K. Hane, D. Briand, W. Noell, N. De Rooij

研究成果: Paper査読

抄録

Bridges buckled by the film stress can realize three-dimensional structures such as vertical comb drive actuator. We have demonstrated the micromirror lifted by the buckled bridges. The detailed profiles of the buridge and the lifted micromirror are examined. This clears the effect of the bend and the design differences.

本文言語English
ページ1337-1340
ページ数4
出版ステータスPublished - 2008 12 1
イベント15th International Display Workshops, IDW '08 - Niigata, Japan
継続期間: 2008 12 32008 12 5

Other

Other15th International Display Workshops, IDW '08
CountryJapan
CityNiigata
Period08/12/308/12/5

ASJC Scopus subject areas

  • Hardware and Architecture
  • Human-Computer Interaction
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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