抄録
Bridges buckled by the film stress can realize three-dimensional structures such as vertical comb drive actuator. We have demonstrated the micromirror lifted by the buckled bridges. The detailed profiles of the buridge and the lifted micromirror are examined. This clears the effect of the bend and the design differences.
| 本文言語 | English |
|---|---|
| ページ | 1337-1340 |
| ページ数 | 4 |
| 出版ステータス | Published - 2008 12 1 |
| イベント | 15th International Display Workshops, IDW '08 - Niigata, Japan 継続期間: 2008 12 3 → 2008 12 5 |
Other
| Other | 15th International Display Workshops, IDW '08 |
|---|---|
| Country | Japan |
| City | Niigata |
| Period | 08/12/3 → 08/12/5 |
ASJC Scopus subject areas
- Hardware and Architecture
- Human-Computer Interaction
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials