TY - JOUR
T1 - Comprehensive study of magnetostriction-based MEMS magnetic sensor of a FeGa/PZT cantilever
AU - Indianto, Mohammad Akita
AU - Toda, Masaya
AU - Ono, Takahito
N1 - Funding Information:
This work was supported by JSPS KAKENHI Grant Numbers 19H02568 and partially supported by JSPS KAKENHI Grant Numbers 20H02212. Part of this work was performed at the Micro/Nano machining Research and Education Center (MNC) and Micro System Integration Center (μSIC) of Tohoku University. One of the authors (M. A. I.) is financially supported by the Japan International Cooperation Agency (JICA) during the study at Tohoku University, Japan.
Funding Information:
This work was supported by JSPS KAKENHI Grant Numbers 19H02568 and partially supported by JSPS KAKENHI Grant Numbers 20H02212 . Part of this work was performed at the Micro/Nano machining Research and Education Center (MNC) and Micro System Integration Center (μSIC) of Tohoku University. One of the authors (M. A. I.) is financially supported by the Japan International Cooperation Agency (JICA) during the study at Tohoku University, Japan.
Publisher Copyright:
© 2021 Elsevier B.V.
PY - 2021/11/1
Y1 - 2021/11/1
N2 - This research comprehensively studies a magnetostriction-based cantilever resonator magnetic sensor of Iron Gallium (FeGa) coupled to a piezoelectric material of lead zirconate titanate (PZT) is performed. The study is meant to explore its magnetic sensing mechanism, reaction to magnetic field direction, the separate effect of magnetic force, and the advantage of miniaturization. The FeGa/PZT cantilever is sensitive to magnetic field direction when objected to a static DC magnetic field in the perpendicular direction with 5.47 Hz/mT sensitivity. It is also concluded that the FeGa/PZT cantilever is also sensitive to magnetic force with a different reaction to a static magnetic field. The sensitivity to magnetic force is in the value of 1.77 Hz/mT. Both sensitivities are calculated from the slope of the resonance frequency shift and magnetic field graph divided by its resonance frequency. The Allan variance method's minimum detectable magnetic field is determined with a frequency noise of 0.02 Hz, equal to 3.66 μT. The minimum detectable magnetic field can be improved by reducing the thermal noise through structure modification by designing a narrow, thin, and long cantilever with a high Q factor with complementary material. The magnetostriction-based magnetic sensor can be applied in either direct magnetic field measurement or a magnetic resonance system such as micro NMR or micro ESR.
AB - This research comprehensively studies a magnetostriction-based cantilever resonator magnetic sensor of Iron Gallium (FeGa) coupled to a piezoelectric material of lead zirconate titanate (PZT) is performed. The study is meant to explore its magnetic sensing mechanism, reaction to magnetic field direction, the separate effect of magnetic force, and the advantage of miniaturization. The FeGa/PZT cantilever is sensitive to magnetic field direction when objected to a static DC magnetic field in the perpendicular direction with 5.47 Hz/mT sensitivity. It is also concluded that the FeGa/PZT cantilever is also sensitive to magnetic force with a different reaction to a static magnetic field. The sensitivity to magnetic force is in the value of 1.77 Hz/mT. Both sensitivities are calculated from the slope of the resonance frequency shift and magnetic field graph divided by its resonance frequency. The Allan variance method's minimum detectable magnetic field is determined with a frequency noise of 0.02 Hz, equal to 3.66 μT. The minimum detectable magnetic field can be improved by reducing the thermal noise through structure modification by designing a narrow, thin, and long cantilever with a high Q factor with complementary material. The magnetostriction-based magnetic sensor can be applied in either direct magnetic field measurement or a magnetic resonance system such as micro NMR or micro ESR.
KW - Allan variance
KW - FeGa/PZT cantilever
KW - Magnetic sensor
KW - Q factor
KW - Resonance frequency
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U2 - 10.1016/j.sna.2021.112985
DO - 10.1016/j.sna.2021.112985
M3 - Article
AN - SCOPUS:85111535479
SN - 0924-4247
VL - 331
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
M1 - 112985
ER -