Compositional inhomogeneities in sputtered Co-Cr magnetic thin films studied by atom probe field ion microscopy

K. Hono, Y. Maeda, S. S. Babu, Toshio Sakurai

    研究成果: Article査読

    17 被引用数 (Scopus)

    抄録

    Compositional inhomogeneities in Co-22 at. % Cr sputtered thin films have been studied quantitatively using atom probe field ion microscopy. For comparison, a Co-22 at. % Cr bulk alloy specimen has also been examined. As predicted from the recently published phase diagram, a solution treated Co-Cr bulk alloy specimen does not contain detectable chemical inhomogeneities. On the other hand, the Co-22 at. % Cr thin film sputter deposited at 200 °C consists of two distinct phases with different Cr concentrations. The size of each phase is in the order of 8 nm which is significantly smaller than the grain size of the specimen; however, the film that was sputter deposited at ambient temperature exhibited a significantly lower level of compositional inhomogeneity. Based on these results, it is concluded that the phase separation progresses when thin films are deposited on heated substrates.

    本文言語English
    ページ(範囲)8025-8031
    ページ数7
    ジャーナルJournal of Applied Physics
    76
    12
    DOI
    出版ステータスPublished - 1994 12 1

    ASJC Scopus subject areas

    • 物理学および天文学(全般)

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