(Nd,Mn)-cosubstituted BiFeO3 (BFO) films with various Nd and Mn compositions were fabricated on a Pt/SrTiO3(100) substrate by pulsed laser deposition. X-ray diffraction patterns and atomic force microscopy images indicated that the suppression of impurity phases and a smooth surface morphology were realized by Nd substitution in the BFO films. Furthermore, by combining with Nd substitution, a small amount of Mn substitution in BFO films is effective for reducing the leakage current density by three orders of magnitude compared with that of a BFO film capacitor. The polarization vs electric field (P-E) curves showed a strong dependence of measurement frequency in the range of 0.1-2 kHz, and well-saturated P-E hysteresis loops were observed at 20kHz at room temperature. The remanent polarization and coercive field at a maximum electric field of 1.9MV/cm were approximately 70μC/cm2 and 0.32MV/cm, respectively.
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