TY - JOUR
T1 - Comparative study on the excitation mechanism of chromium emission lines in the argon radio-frequency inductively-coupled plasma, nitrogen microwave induced plasma, and argon or nitrogen glow discharge plasmas
AU - Wagatsuma, Kazuaki
AU - Danzaki, Yûetsu
AU - Nakahara, Taketoshi
N1 - Funding Information:
A part of this work was carried out under the Visiting Researcher’s Program of the Institute for Materials Research, Tohoku University, Japan. This study was in part supported by a grant-in-aid from the Ministry of Education of Japan (No. 09640713).
PY - 2003
Y1 - 2003
N2 - Boltzmann plots of both atomic and ionic chromium emission lines are investigated to compare the excitation mechanisms in four different plasmas: an argon inductively-coupled plasma (Ar-1CP), a nitrogen high-power microwave induced plasma (N2-MIP), an argon glow discharge plasma (Ar-GDP), and a nitrogen glow discharge plasma (N2-GDP). The plots of the atomic lines and the ionic lines give both linear relationships as well as similar excitation temperatures in the case of the Ar-ICP, the N2-MIP, and the N2-GDP. It implies that a thermodynamic process such as electron collision would control their excitations. However, only in the case of the ionic-line plot in the Ar-GDP, a departure from linear relationship is observed and the estimated excitation temperature is rather higher than that with the atomic lines, meaning that a specific excitation mechanism exists in the Ar-GDP. A possible explanation for these results is that a charge-transfer collision between chromium atom and argon ion plays a dominant role in exciting highly-lying energy levels of chromium ion, especially in the Ar-GDP.
AB - Boltzmann plots of both atomic and ionic chromium emission lines are investigated to compare the excitation mechanisms in four different plasmas: an argon inductively-coupled plasma (Ar-1CP), a nitrogen high-power microwave induced plasma (N2-MIP), an argon glow discharge plasma (Ar-GDP), and a nitrogen glow discharge plasma (N2-GDP). The plots of the atomic lines and the ionic lines give both linear relationships as well as similar excitation temperatures in the case of the Ar-ICP, the N2-MIP, and the N2-GDP. It implies that a thermodynamic process such as electron collision would control their excitations. However, only in the case of the ionic-line plot in the Ar-GDP, a departure from linear relationship is observed and the estimated excitation temperature is rather higher than that with the atomic lines, meaning that a specific excitation mechanism exists in the Ar-GDP. A possible explanation for these results is that a charge-transfer collision between chromium atom and argon ion plays a dominant role in exciting highly-lying energy levels of chromium ion, especially in the Ar-GDP.
KW - Argon glow discharge plasma
KW - Argon inductively coupled plasma
KW - Boltzmann plot
KW - Charge-transfer collision
KW - Chromium
KW - Excitation mechanism
KW - Nitrogen glow discharge plasma
KW - Nitrogen microwave induced plasma
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U2 - 10.1081/SL-120021177
DO - 10.1081/SL-120021177
M3 - Article
AN - SCOPUS:0038315264
VL - 36
SP - 99
EP - 115
JO - Spectroscopy Letters
JF - Spectroscopy Letters
SN - 0038-7010
IS - 1-2
ER -