Comparative investigation into surface charged multi-walled carbon nanotubes reinforced Cu nanocomposites for interconnect applications

研究成果: Article査読

21 被引用数 (Scopus)

抄録

We present the electrodeposition of copper (Cu) nanocomposites with a high content of carbon nanotubes (CNTs), and evaluate the mechanical and thermal properties of the nanocomposites. Two kinds of multi-walled CNTs (MWCNTs), thermally-annealed at 1200 °C and 2600 °C, are pretreated in a polyelectrolyte solution to show positive charges on their surfaces and added into a sulfuric Cu electroplating solution. The weight fractions of the MWCNTs in the electroplated composites are 5.3 wt% and 2.8 wt%, respectively. The Young's moduli of the composites are approximately 1.2 times and 1.1 times greater than that of a pure Cu thin film, and the coefficients of thermal expansion (CTEs) of the composites are reduced to be 77% and 85% of the CTE of the pure Cu film, respectively. The mechanical strengthening and thermal expansion reduction are found in the composite. These results show that the nanocomposites would be used instead of Cu thin film for interconnect applications.

本文言語English
ページ(範囲)137-143
ページ数7
ジャーナルComposites Part B: Engineering
95
DOI
出版ステータスPublished - 2016 6 15

ASJC Scopus subject areas

  • セラミックおよび複合材料
  • 材料力学
  • 機械工学
  • 産業および生産工学

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