Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications

Ryoma Miyake, Mario Kiuchi, Shinya Yoshida, Shuji Tanaka, Glen R. Fox

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

A commercially produced monocrystalline-like epitaxial PZT film is described for piezoelectric MEMS applications. Films with a thickness of 1\ \mu \mathrm{m} to 2\ \mu \mathrm{m} exhibit a typical transverse piezoelectric d31 coefficient of -185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. These films are commercially available for piezoelectric MEMS device development and production.

本文言語English
ホスト出版物のタイトルIFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781728164304
DOI
出版ステータスPublished - 2020 7月
イベント2020 Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020 - Virtual, Keystone, United States
継続期間: 2020 7月 192020 7月 23

出版物シリーズ

名前IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings

Conference

Conference2020 Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020
国/地域United States
CityVirtual, Keystone
Period20/7/1920/7/23

ASJC Scopus subject areas

  • 信号処理
  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 原子分子物理学および光学

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