Combinatorial thin film synthesis and its high throughput screening for inorganic functional materials

Tetsuya Hasegawa, Tomoteru Fukumura

研究成果: Review article査読

1 被引用数 (Scopus)

抄録

Combinatorial approach toward discovery of new functional materials and properties is a powerful method in fields of material science, because such approach can considerably decrease the time consumption for the discovery. Here, we focus on the combinaotorial approach to inorganic functional materials such as oxides, and review various studies on combinatorial thin film synthesis and high throughput screening techniques of structural, electric, magnetic, and optical properties.

本文言語English
ページ(範囲)549-558
ページ数10
ジャーナルJournal of the Vacuum Society of Japan
54
11
DOI
出版ステータスPublished - 2011
外部発表はい

ASJC Scopus subject areas

  • 材料科学(全般)
  • 器械工学
  • 表面および界面
  • 分光学

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