Combinatorial molecular layer epitaxy of Hf based phosphor oxides

N. Arai, T. W. Kim, H. Kubota, Y. Matsumoto, H. Koinuma

研究成果: Conference article査読

1 被引用数 (Scopus)


A series of MHfO3: Tm (M =Ca, Sr and Ba) composition spread films and superlattices (SLs) were quickly fabricated on SrTiO3 (001) substrate in the molecular layer-by-layer growth using combinatorial pulsed laser deposition (PLD) under in-situ reflection high-energy electron diffraction (RHEED) monitoring. Crystal structures and luminescence properties of composition-spread and SLs were evaluated by the concurrent X-ray diffractometer and cathode luminescence (CL), respectively. CL properties of the films were found strongly dependent on their composition and stacking sequence. Possible effect of the stress due to the film-substrate interaction on the CL property is discussed.

ジャーナルMaterials Research Society Symposium - Proceedings
出版ステータスPublished - 2002 1 1
イベントCombinatorial and Artificial Intelligence Methods in Materials Science - Boston, MA, United States
継続期間: 2001 11 262001 11 29

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学


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