Combinatorial fabrication and phase diagramming of ternary composition spreads

Parhat Ahmet, Takahiro Nagata, Dmitry Anatolyevich Kukuruznyak, Kenji Ohmori, Kuniyuki Kakushima, Kazuo Tsutsui, Toyohiro Chikyow, Hiroshi Iwai

研究成果: Conference contribution

抄録

A combinatorial fabrication method for three-component composition spread thin films was developed. Any desired specific part or a complete ternary diagram can be deposited onto a single substrate by sequentially ablating /sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of ternary oxide and metal thin films.

本文言語English
ホスト出版物のタイトルProceedings of the 5th International Conference on Semiconductor Technology, ISTC 2006
ページ215-224
ページ数10
出版ステータスPublished - 2006
イベント5th International Conference on Semiconductor Technology, ISTC 2006 - Shanghai, China
継続期間: 2006 3 212006 3 23

出版物シリーズ

名前Proceedings - Electrochemical Society
PV 2006-03

Other

Other5th International Conference on Semiconductor Technology, ISTC 2006
CountryChina
CityShanghai
Period06/3/2106/3/23

ASJC Scopus subject areas

  • Engineering(all)

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