Combinatorial fabrication and characterization of oxide and metal thin film composition spreads

Parhat Ahmet, Takahiro Nagata, Dmitry Anatolyevich Kukuruznyak, Kenji Ohmori, Kuniyuki Kakushima, Kazuo Tsutsui, Toyohiro Chikyow, Hiroshi Iwai

研究成果: Conference contribution

抄録

A combinatorial fabrication method for binary composition spread and three-component composition spread thin films was developed. Any desired specific part or a complete binary/ternary diagram can be deposited onto a single substrate by sequentially ablating/sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of binary/ternary oxide and metal thin films. Copyright The Electrochemical Society.

本文言語English
ホスト出版物のタイトルDielectrics for Nanosystems II
ホスト出版物のサブタイトルMaterials Science, Processing, Reliability, and Manufacturing
出版社Electrochemical Society Inc.
ページ79-90
ページ数12
1
ISBN(電子版)1566774381
ISBN(印刷版)1566774381, 9781566774383
出版ステータスPublished - 2006
外部発表はい
イベント2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society - Denver, CO, United States
継続期間: 2006 5 72006 5 12

出版物シリーズ

名前ECS Transactions
番号1
2
ISSN(印刷版)1938-5862
ISSN(電子版)1938-6737

Other

Other2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society
国/地域United States
CityDenver, CO
Period06/5/706/5/12

ASJC Scopus subject areas

  • 工学(全般)

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