TY - JOUR
T1 - Combinatorial analysis of plasma-surface interactions of poly(ethylene terephthalate) with X-ray photoelectron spectroscopy
AU - Takenaka, Kosuke
AU - Cho, Ken
AU - Setsuhara, Yuichi
AU - Shiratani, Masaharu
AU - Sekine, Makoto
AU - Hori, Masaru
PY - 2010/8
Y1 - 2010/8
N2 - Combinatorial analysis has been demonstrated for the examination of plasma-surface interactions of poly(ethylene terephthalate) (PET) in terms of chemical bonding state, with X-ray photoelectron spectroscopy (XPS). The chemical bonding states have been investigated for PET films exposed to an argon-oxygen mixture plasma with a density gradient sustained with RF power of 88, 175, and 350 W. The XPS results obtained from three batches of experiments showed a slight increase in the bond peaks caused by the oxidation of which PET with an increase in the product of (ion saturation current) δ (plasma exposure time), corresponds to ion dose.
AB - Combinatorial analysis has been demonstrated for the examination of plasma-surface interactions of poly(ethylene terephthalate) (PET) in terms of chemical bonding state, with X-ray photoelectron spectroscopy (XPS). The chemical bonding states have been investigated for PET films exposed to an argon-oxygen mixture plasma with a density gradient sustained with RF power of 88, 175, and 350 W. The XPS results obtained from three batches of experiments showed a slight increase in the bond peaks caused by the oxidation of which PET with an increase in the product of (ion saturation current) δ (plasma exposure time), corresponds to ion dose.
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U2 - 10.1143/JJAP.49.08JA02
DO - 10.1143/JJAP.49.08JA02
M3 - Article
AN - SCOPUS:77958085286
SN - 0021-4922
VL - 49
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 8 PART 2
M1 - 08JA02
ER -