Comb-drive GaN micro-mirror on a GaN-on-silicon platform

Yongjin Wang, Takashi Sasaki, Tong Wu, Fangren Hu, Kazuhiro Hane

研究成果: Article査読

16 被引用数 (Scopus)

抄録

We report here a double-sided process for the fabrication of a comb-drive GaN micro-mirror on a GaN-on-silicon platform. A silicon substrate is first patterned from the backside and removed by deep reactive ion etching, resulting in totally suspended GaN slabs. GaN microstructures including the torsion bars, movable combs and mirror plate are then defined on a freestanding GaN slab by the backside alignment technique and generated by fast atom beam etching with Cl2 gas. Although the fabricated comb-drive GaN micro-mirrors are deflected by the residual stress in GaN thin films, they can operate on a high resistivity silicon substrate without introducing any additional isolation layer. The optical rotation angles are experimentally characterized in the rotation experiments. This work opens the possibility of producing GaN optical micro-electro-mechanical-system (MEMS) devices on a GaN-on-silicon platform.

本文言語English
論文番号035012
ジャーナルJournal of Micromechanics and Microengineering
21
3
DOI
出版ステータスPublished - 2011 3月

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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