Circular multilayer zone plate for high-energy x-ray nano-imaging

Takahisa Koyama, Hidekazu Takano, Shigeki Konishi, Takuya Tsuji, Hisataka Takenaka, Satoshi Ichimaru, Tadayuki Ohchi, Yasushi Kagoshima

研究成果: Review article査読

28 被引用数 (Scopus)

抄録

A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi 2 and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.

本文言語English
論文番号013705
ジャーナルReview of Scientific Instruments
83
1
DOI
出版ステータスPublished - 2012 1
外部発表はい

ASJC Scopus subject areas

  • Instrumentation

フィンガープリント 「Circular multilayer zone plate for high-energy x-ray nano-imaging」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル