Characterization of submicron-scale periodic grooves by grazing incidence ultra-small-angle X-ray scattering

Yoshiyasu Ito, Katsuhiko Inaba, Kazuhiko Omote, Yasuo Wada, Susumu Ikeda

研究成果: Article査読

12 被引用数 (Scopus)

抄録

A grazing incidence ultra-small-angle X-ray scattering measurement system using a laboratory X-ray source has been developed. Submicron-scale artificial periodic grooves on thermally oxidized silicon wafers are characterized using this system. They are fabricated by electron beam lithography. The average pitch widths of the grooves are determined accurately with a low standard uncertainty of less than 0.02%. The cross-sectional profiles are also analyzed by intensity ratios of higher-order diffraction peaks from the periodic structures and X-ray reflectivity measurements. The obtained cross-sectional profiles are in good agreement with those obtained by atomic force microscopy.

本文言語English
ページ(範囲)L773-L775
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
46
29-32
DOI
出版ステータスPublished - 2007 8月 10
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(その他)
  • 物理学および天文学(全般)

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