Characterization of oxide films on SiC epitaxial (000-1) faces by angle-resolved photoemission spectroscopy measurements using synchrotron radiation

Y. Hijikata, H. Yaguchi, S. Yoshida, Y. Takata, K. Kobayashi, S. Shin, H. Nohira, T. Hattori

    研究成果: Conference contribution

    4 被引用数 (Scopus)

    抄録

    Thermal oxide films on SiC epitaxial (000-1) C-faces have been characterized by angle-resolved photoemission spectroscopy (AR-PES). The structure of wet oxide/SiC C-face interface was compared with that of dry oxide/SiC C-face, as well as that of dry oxide/SiC Si-face, in order to clarify why a MOS device of SiC C-face achieved good electrical properties. The improvement in electrical properties was confirmed by AR-PES measurements, evidencing differences in binding energy between SiC and the Si4+ components in Si2p and valence band region, and in binding energy between SiC and the CHx components in C1s. The reason for the improvement in electrical property of MOS devices by use of SiC C-face are discussed in terms of depth profiles of oxide films calculated from the AR-PES results.

    本文言語English
    ホスト出版物のタイトルSilicon Carbide and Related Materials 2004, ECSCRM 2004 - Proceedings of 5th European Conference on Silicon Carbide and Related Materials
    出版社Trans Tech Publications Ltd
    ページ585-588
    ページ数4
    ISBN(印刷版)0878499636, 9780878499632
    DOI
    出版ステータスPublished - 2005 1 1
    イベント5th European Conference on Silicon Carbide and Related Materials, ECRSCRM2004 - Bologna, Italy
    継続期間: 2004 8 312004 9 4

    出版物シリーズ

    名前Materials Science Forum
    483-485
    ISSN(印刷版)0255-5476
    ISSN(電子版)1662-9752

    Other

    Other5th European Conference on Silicon Carbide and Related Materials, ECRSCRM2004
    CountryItaly
    CityBologna
    Period04/8/3104/9/4

    ASJC Scopus subject areas

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

    フィンガープリント 「Characterization of oxide films on SiC epitaxial (000-1) faces by angle-resolved photoemission spectroscopy measurements using synchrotron radiation」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

    引用スタイル