Characterization of nanometer-sized Pt-dendrite structures fabricated on insulator Al2O3 substrate by electron-beam-induced deposition

Guoqiang Xie, Minghui Song, Kazutaka Mitsuishi, Kazuo Furuya

    研究成果: Article査読

    9 被引用数 (Scopus)

    抄録

    Nanometer-sized Pt-dendrite structures were fabricated on an insulator Al2O3 substrate using an electron-beam-induced deposition (EBID) process in a transmission electron microscope (TEM). The as-fabricated structures were characterized using conventional and high-resolution transmission electron microscopies (CTEM and HRTEM) and X-ray energy dispersive spectroscopy (EDS). The as-fabricated nanodendrites consisted of many nano-grains and amorphous state structures. The nanometer-sized grains were determined to be Pt crystals with face-centered cubic (fcc) structure. The formation of the nanodendrite structures are discussed to relate to a mechanism involving charge-up produced on surface of the substrate, movement of charges to and accumulation at the convex surface of the substrate and the tips of the deposits.

    本文言語English
    ページ(範囲)2567-2571
    ページ数5
    ジャーナルJournal of Materials Science
    41
    9
    DOI
    出版ステータスPublished - 2006 5

    ASJC Scopus subject areas

    • 材料科学(全般)
    • 材料力学
    • 機械工学

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