Characterization of images produced by single and multiple apertures and their applications

K. Hane, C. P. Grover

研究成果: Article査読

抄録

We have considered the image formation due to a number of single and multiple apertures in their immediate vicinity. Under incoherent illumination the images are produced with an extremely high demagnification, typically of the order of 103. Analyses based on geometrical optics, Fresnel-Kirchhoff diffraction theory and the optical transfer function (OTF) have been used to characterize the images produced by pinholes, rectangular slits and rectangular transmission gratings. The high factor of demagnification has been advantageously utilized for numerous applications including image subtraction and phase object characterization. The reverse geometry producing highly magnified images has been discussed and applied to displacement metrology.

本文言語English
ページ(範囲)131-144
ページ数14
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
954
DOI
出版ステータスPublished - 1989 1 16
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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