Characterization of Epitaxial-PZT/SI Piezoelectric Micromachined Ultrasonic Transducer (PMUT) and its Phased Array System

Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryouichi Takayama, Shuji Tanaka

研究成果: Conference contribution

3 引用 (Scopus)

抜粋

In this study, we have demonstrated the usability of an epitaxial lead zirconate titanate (Epi-PZT) thin film for a piezoelectric micromachined ultrasonic transducer (pMUT) imager. At first, transmitting abilities and receiving sensitivities of the single-element pMUT based on Epi PZT and polycrystalline PZT (Poly-PZT) were evaluated as a fundamental study. Then, the 8-ch linear array system driven by a commercially-available pulser board was built, and successfully formed a focused ultrasonic beam. Finally, we obtained the ultrasonic images of a polydimethylsiloxane-based phantom by using the Epi-PZT and Poly-PZT pMUT linear array, and experimentally proved that Epi-PZT pMUT array can obtain higher contrast image compared to Poly-PZT device.

元の言語English
ホスト出版物のタイトル2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
出版者Institute of Electrical and Electronics Engineers Inc.
ページ246-249
ページ数4
ISBN(電子版)9781728120072
DOI
出版物ステータスPublished - 2019 6
イベント20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
継続期間: 2019 6 232019 6 27

出版物シリーズ

名前2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Germany
Berlin
期間19/6/2319/6/27

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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  • これを引用

    Liu, Z., Yoshida, S., Horie, T., Okamoto, S., Takayama, R., & Tanaka, S. (2019). Characterization of Epitaxial-PZT/SI Piezoelectric Micromachined Ultrasonic Transducer (PMUT) and its Phased Array System. : 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 246-249). [8808425] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808425