Characterization and fabrication of zinc oxide nanowire devices

W. C. Lin, Y. C. Lin, C. J. Shih, Y. L. Chu, M. Esashi, A. A. Seshia

    研究成果: Conference contribution

    1 被引用数 (Scopus)

    抄録

    In this paper, we demonstrate an approach for the local synthesis of ZnO nanowires (ZnO NWs) and the potential for such structures to be incorporated into device applications. Three network ZnO NW devices are fabricated on a chip by using a bottom-up synthesis approach. Microheaters (defined by standard semiconductor processing) are used to synthesize the ZnO NWs under a zinc nitrate (Zn(NO3)2·6H2O) and hexamethylenetetramine (HMTA, (CH2)6·N4) solution. By controlling synthesis parameters, varying densities of networked ZnO NWs are locally synthesized on the chip. The fabricated networked ZnO NW devices are then characterized using UV excitation and cyclic voltammetry (CV) experiments to measure their photoresponse and electrochemical properties. The experimental results show that the techniques and material systems presented here have the potential to address interesting device applications using fabrication methods that are fully compatible with standard semiconductor processing.

    本文言語English
    ホスト出版物のタイトルIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
    ページ441-444
    ページ数4
    DOI
    出版ステータスPublished - 2013
    イベントIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
    継続期間: 2013 1 202013 1 24

    出版物シリーズ

    名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    ISSN(印刷版)1084-6999

    Other

    OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
    国/地域Taiwan, Province of China
    CityTaipei
    Period13/1/2013/1/24

    ASJC Scopus subject areas

    • 電子材料、光学材料、および磁性材料
    • 凝縮系物理学
    • 機械工学
    • 電子工学および電気工学

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