Characteristics of copper spiral inductors utilizing FePt nanodot films

Woo Cheol Jeong, Kouji Kiyoyama, Kang Wook Lee, Akihiro Noriki, Mariappan Murugesan, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi

研究成果: Article

1 引用 (Scopus)

抜粋

We propose a novel Cu spiral inductor with an FePt magnetic nanodot (MND) layer of FePt magnetic nanodots dispersed in SiO2 film by self-assembled nanodot desposition (SAND). We expected an increase in inductance by adopting an MND layer. Nanodot sizes ranging from 2.5 to 3.5nm in diameter can be well controlled. By optimizing thermal annealing conditions, we formed an FePt MND film with an electromagnetic permeability of 7.7 for passive devices used in a standard radio-frequency integrated circuit (RFIC) process. The quality factors of various spiral inductors were simulated and compared with the measured quality factors of the Cu spiral inductors we fabricated. In addition, the high-frequency characteristics of Cu spiral inductors were successfully observed.

元の言語English
記事番号04C157
ジャーナルJapanese journal of applied physics
48
発行部数4 PART 2
DOI
出版物ステータスPublished - 2009 4 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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    Jeong, W. C., Kiyoyama, K., Lee, K. W., Noriki, A., Murugesan, M., Fukushima, T., Tanaka, T., & Koyanagi, M. (2009). Characteristics of copper spiral inductors utilizing FePt nanodot films. Japanese journal of applied physics, 48(4 PART 2), [04C157]. https://doi.org/10.1143/JJAP.48.04C157