Characteristics of buckled bridges and lifted micromirror using film stress

M. Sasaki, K. Hane, D. Briand, W. Noell, N. De Rooij

研究成果: Conference contribution

元の言語English
ホスト出版物のタイトルIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
ページ82-83
ページ数2
出版物ステータスPublished - 2006 12 1
イベントIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
継続期間: 2006 8 212006 8 24

出版物シリーズ

名前IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
United States
Big Sky, MT
期間06/8/2106/8/24

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

これを引用

Sasaki, M., Hane, K., Briand, D., Noell, W., & De Rooij, N. (2006). Characteristics of buckled bridges and lifted micromirror using film stress. : IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (pp. 82-83). [1708275] (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).