Characteristics of a Thin Film Microtransformer with Circular Spiral Coils

Kazuyuki Yamaguchi, Jirou Toriu, Shigehiro Ohnuma, Takao Imagawa, Hidetoshi Matsuki, Koichi Murakami

研究成果: Article査読

48 被引用数 (Scopus)

抄録

A thin film microtransformer with the size of 3.14 x 3.88 mm2 was fabricated by using photolithography technology to support high-frequency switching regulators. The microtransformer was composed of sputtered amorphous magnetic layers, electroplated copper windings with 20 pm width and insulator layers. A coupling factor between the primary and secondard windings of the microtransformer was 0.97 for f= 3 MHz. The input-output voltage ratio of 0.95 at 15 MHz was obtained at no-load. The observation of the domain images under high frequency excitation indicated the magnetic anisotropy of films of the microtransformer with circular spiral coils was induced by a rotating magnetic field annealing so as to increase the output voltage.

本文言語English
ページ(範囲)2232-2237
ページ数6
ジャーナルIEEE Transactions on Magnetics
29
5
DOI
出版ステータスPublished - 1993 9

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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