Characteristics of a micro-plasma produced by atmospheric pressure RF impulse discharge using coaxial micro-electrode

Yasuhiro Tanaka, Satoru Iizuka

研究成果: Article査読

8 被引用数 (Scopus)

抄録

In order to achieve inner wall surface treatment of glass tube of micrometer and gas decomposition flowing through a small diameter glass tube, a micro-plasma is useful. We have developed a new method for producing a micro-plasma in order to apply to the surface treatment and micro-plasma CVD on the inner wall surface of a micro-glass tube at atmospheric pressure. The plasma is produced by using a coaxial micro-electrode to which RF impulse is applied. We have elucidated fundamental characteristics of the discharge and optimized the electrode configuration. We find that breakdown voltage can be decreased with a decrease in the diameter of the inner electrode. We also clarified the effect of gas species and flow rate on the discharge.

本文言語English
ページ(範囲)436-439
ページ数4
ジャーナルThin Solid Films
506-507
DOI
出版ステータスPublished - 2006 5 26
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 表面および界面
  • 表面、皮膜および薄膜
  • 金属および合金
  • 材料化学

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