Channel waveguide fabrication of organic nonlinear optical crystal, DAST, by Using oxygen RIE

K. Takayama; Masato Yoshida; H. H. Deng; K. Komatsu; T. Kaino

Channel waveguide fabrication of organic nonlinear optical crystal, DAST, by Using oxygen RIE

K. Takayama, Masato Yoshida, H. H. Deng, K. Komatsu, T. Kaino

電気通信研究所・ブロードバンド工学研究部門

研究成果: Article › 査読

10 被引用数 (Scopus)

抄録

An organic salt, 4-N,N-dimethylamino-4′-N′-methyl-stilbazolium tosylate, DAST, has large second-order optical nonlinearities. A ridge waveguide of the DAST crystal was fabricated, for the first time to our knowledge, by using photolithography and oxygen reactive ion etching (RIE). The DAST ridge waveguide. 34 × 20 μm and 6 × 6 μm channels with 2mm in length were successfully fabricated by this process.

本文言語	English
ページ（範囲）	413-418
ページ数	6
ジャーナル	Molecular Crystals and Liquid Crystals Science and Technology Section B: Nonlinear Optics
巻	25
号	1-4
出版ステータス	Published - 2000 12 1

ASJC Scopus subject areas

Control and Systems Engineering
Condensed Matter Physics

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引用スタイル

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title = "Channel waveguide fabrication of organic nonlinear optical crystal, DAST, by Using oxygen RIE",

abstract = "An organic salt, 4-N,N-dimethylamino-4′-N′-methyl-stilbazolium tosylate, DAST, has large second-order optical nonlinearities. A ridge waveguide of the DAST crystal was fabricated, for the first time to our knowledge, by using photolithography and oxygen reactive ion etching (RIE). The DAST ridge waveguide. 34 × 20 μm and 6 × 6 μm channels with 2mm in length were successfully fabricated by this process.",

keywords = "Channel waveguide, DAST, Organic crystal, Photolithography, RIE",

author = "K. Takayama and Masato Yoshida and Deng, {H. H.} and K. Komatsu and T. Kaino",

year = "2000",

month = dec,

day = "1",

language = "English",

volume = "25",

pages = "413--418",

journal = "Molecular Crystals and Liquid Crystals Science and Technology Section B: Nonlinear Optics",

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TY - JOUR

T1 - Channel waveguide fabrication of organic nonlinear optical crystal, DAST, by Using oxygen RIE

AU - Takayama, K.

AU - Yoshida, Masato

AU - Deng, H. H.

AU - Komatsu, K.

AU - Kaino, T.

PY - 2000/12/1

Y1 - 2000/12/1

N2 - An organic salt, 4-N,N-dimethylamino-4′-N′-methyl-stilbazolium tosylate, DAST, has large second-order optical nonlinearities. A ridge waveguide of the DAST crystal was fabricated, for the first time to our knowledge, by using photolithography and oxygen reactive ion etching (RIE). The DAST ridge waveguide. 34 × 20 μm and 6 × 6 μm channels with 2mm in length were successfully fabricated by this process.

AB - An organic salt, 4-N,N-dimethylamino-4′-N′-methyl-stilbazolium tosylate, DAST, has large second-order optical nonlinearities. A ridge waveguide of the DAST crystal was fabricated, for the first time to our knowledge, by using photolithography and oxygen reactive ion etching (RIE). The DAST ridge waveguide. 34 × 20 μm and 6 × 6 μm channels with 2mm in length were successfully fabricated by this process.

KW - Channel waveguide

KW - DAST

KW - Organic crystal

KW - Photolithography

KW - RIE

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VL - 25

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JO - Molecular Crystals and Liquid Crystals Science and Technology Section B: Nonlinear Optics

JF - Molecular Crystals and Liquid Crystals Science and Technology Section B: Nonlinear Optics

SN - 1543-0537

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ER -