Control of the cavity pressure of packaged micro mechanical devices is important to achieve wide frequency range by critical damping. We developed a novel method using non-evaporable getters (NEG) and inert gas to control the cavity pressure in anodically bonded glass-silicon structure. From the pressure control experiments using silicon diaphragms, it was confirmed that the cavity pressure could be controlled as designed, that is, 1 and 100Torr. In application to an accelerometer, cavity pressure was successfully controlled for wide frequency response.
|出版ステータス||Published - 1995 12 1|
|イベント||Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden|
継続期間: 1995 6 25 → 1995 6 29
|Other||Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)|
|Period||95/6/25 → 95/6/29|
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