Capacitive resonant mass sensor with frequency demodulation detection based on resonant circuit

Sang Jin Kim, Takahito Ono, Masayoshi Esashi

研究成果: Article査読

39 被引用数 (Scopus)

抄録

In this letter, capacitive mass sensing with a 250-nm-thick single-crystalline silicon cantilever is investigated. The mass sensor employs the frequency modulation detection method using an electrical LC oscillator, in which the capacitance of the sensor serves as the component of the oscillator. The displacement noise of the demonstrated capacitive detection is 0.05 nm (Hz)0.5, which is equivalent to the capacitance change of 2.4× 10-21 F. It is experimentally shown that the capacitive detection is less affected to temperature fluctuation noise than optical detection. The detectable minimum mass of 1× 10-14 g is achieved using capacitive detection in ambient atmosphere.

本文言語English
論文番号053116
ページ(範囲)1-3
ページ数3
ジャーナルApplied Physics Letters
88
5
DOI
出版ステータスPublished - 2006

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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