Capacitive AFM Probe for High Speed Imaging

Yuji Shiba, Takahito Ono, Kazuyuki Minami, Masayoshi Esashi

研究成果: Article査読

10 被引用数 (Scopus)

抄録

A capacitive AFM probe having capacitive structure was fabricated by micromachining techniques. For obtaining a high sensitivity and a low voltage-actuation, the thin micro sensor consists of a single crystalline-silicon with a narrow gap between micro-cantilever and opposite electrode was fabricated. The gap is 1μm, the thickness of the cantilever is 0.5μm, and the size is 80×100 μm. As a result of evaluation of the performance, the micro-probe showed a sufficient performance for nanometric sensing. The capacitive AFM probe has a both functions for sensing and actuation, because the deflection of the micro-cantilever can be measured from the capacitance, and the micro-cantilever can be electrostatically actuated. By reducing the cantilever size, the operation with a high speed imaging is expected.

本文言語English
ページ(範囲)647-651
ページ数5
ジャーナルIEEJ Transactions on Sensors and Micromachines
118
12
DOI
出版ステータスPublished - 1998

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

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