A bilayer lipid membrane (BLM) is the main component of the cell membrane of living organisms, which can be formed artificially. Although the specific capacitance of a BLM is known to be in the range of 0.4-1.0 μF cm-2, many previous works that formed free-standing BLMs over an aperture in silicon chips reported larger values beyond this typical range, which suggests that equivalent-circuit models are not adequate. In this work, we modified the equivalent-circuit model by adding a resistance element of silicon. To evaluate the validity of the modified model, we applied the model to the results of electrochemical impedance spectroscopy for free-standing BLMs formed over an aperture in nanofabricated silicon chips. The derived specific capacitance values were 0.57 ± 0.08 μF cm-2, which settles in the typical range.
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