Cantilever probe integrated with light-emitting diode, waveguide, aperture, and photodiode for scanning near-field optical microscope

Minoru Sasaki, Kotaro Tanaka, Kazuhiro Hane

研究成果: Article査読

24 被引用数 (Scopus)

抄録

A microfabricated scanning near-field optical microscope (SNOM) probe integrated with a light-emitting diode, waveguide, aperture, and photodiode is described. This probe includes all optical elements necessary for SNOM on the Si cantilever. By using a-Si as the core layer and SiO2 as the cladding layer, the process for fabricating the waveguide is compatible with that for fabricating the photodiode. The light is confirmed to transmit along the waveguide route with the large curvature. The obtained SNOM image shows a spatial resolution better than 200 nm.

本文言語English
ページ(範囲)7150-7153
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
39
12 B
DOI
出版ステータスPublished - 2000 12

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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