Boxcar averaging based scanning nonlinear dielectric microscopy and its application to carrier distribution Imaging on 2D Semiconductors

Kohei Yamasue, Yasuo Cho

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

Intermittent contact scanning nonlinear dielectric microscopy (IC-SNDM) has recently been applied to the nanoscale carrier or active dopant distribution imaging on two-dimensional semiconductors. However, IC-SNDM may suffer from a lower signal-To-noise (S/N) ratio than conventional contact mode SNDM due to the unoptimized detection of the signal only intermittently occurring. Here we show that S/N ratio can be much improved by applying the idea of boxcar averaging, which makes anomalous carrier doping on atomically-Thin MoS2 clearly visible by IC-SNDM.

本文言語English
ホスト出版物のタイトル2019 IEEE International Integrated Reliability Workshop, IIRW 2019
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781728122038
DOI
出版ステータスPublished - 2019 10月
イベント2019 IEEE International Integrated Reliability Workshop, IIRW 2019 - Fallen Leaf Lake, United States
継続期間: 2019 10月 132019 10月 17

出版物シリーズ

名前IEEE International Integrated Reliability Workshop Final Report
2019-October

Conference

Conference2019 IEEE International Integrated Reliability Workshop, IIRW 2019
国/地域United States
CityFallen Leaf Lake
Period19/10/1319/10/17

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 安全性、リスク、信頼性、品質管理
  • 電子材料、光学材料、および磁性材料

フィンガープリント

「Boxcar averaging based scanning nonlinear dielectric microscopy and its application to carrier distribution Imaging on 2D Semiconductors」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル