Bi-directionally driven metal cantilevers developed for optical actuation

H. Kwon, M. Nakada, Y. Hirabayashi, Akio Higo, M. Ataka, H. Fujita, H. Toshiyoshi

    研究成果: Conference contribution

    4 被引用数 (Scopus)

    抄録

    In this paper we report a silicon solar-cell array to generate voltage (about 4.8V by 16 series PIN diode) to drive cantilever actuators made of stress-controlled combination of chromium-gold-chromium layers for electro-thermal pull-up and electrostatic pull-down motion. The silicon PIN layer was developed by the epitaxial growth on an SOI (silicon-on-insulator) wafer. The metal cantilever actuator was developed by using the reverse sputtering process to minimize the performance variation associated with the patterning error. The bi-directional actuator was developed for potential use in AFM-based data storage.

    本文言語English
    ホスト出版物のタイトル2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
    ページ49-50
    ページ数2
    DOI
    出版ステータスPublished - 2007 12 1
    イベント2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China
    継続期間: 2007 8 122007 8 16

    出版物シリーズ

    名前2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

    Other

    Other2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
    CountryTaiwan, Province of China
    CityHualien
    Period07/8/1207/8/16

    ASJC Scopus subject areas

    • Control and Systems Engineering
    • Electrical and Electronic Engineering

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