Behaviors of neutral and charged silicon self-interstitials during transient enhanced diffusion in silicon investigated by isotope superlattices

Yasuo Shimizu, Masashi Uematsu, Kohei M. Itoh, Akio Takano, Kentarou Sawano, Yasuhiro Shiraki

研究成果: Article査読

11 被引用数 (Scopus)

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Physics & Astronomy