Batch fabricated flat winding shape memory alloy actuator for active catheter

T. Mineta, T. Mitsui, Y. Watanabe, S. Kobayashi, Y. Haga, M. Esashi

研究成果: Paper査読

9 被引用数 (Scopus)

抄録

Batch fabrication process of a shape memory alloy (SMA) sheet based on electrochemical pulsed etching with a sacrificial dummy metal layer has been studied and flat winding S-shape SMA actuators have been developed. The actuators are 38 μm in thickness and generated forces from 40 to 95 mN were obtained according to the width from 410 to 170 μm. The flat winding SMA actuator could realize active catheter with small outer diameter and wide inner working channel. The batch fabrication process was also applied to micromachining of NiTi super elastic alloy (SEA) for biasing spring of the catheter.

本文言語English
ページ375-380
ページ数6
出版ステータスPublished - 2000 1月 1
イベント13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
継続期間: 2000 1月 232000 1月 27

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period00/1/2300/1/27

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

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