Batch fabrication process of a shape memory alloy (SMA) sheet based on electrochemical pulsed etching with a sacrificial dummy metal layer has been studied and flat winding S-shape SMA actuators have been developed. The actuators are 38 μm in thickness and generated forces from 40 to 95 mN were obtained according to the width from 410 to 170 μm. The flat winding SMA actuator could realize active catheter with small outer diameter and wide inner working channel. The batch fabrication process was also applied to micromachining of NiTi super elastic alloy (SEA) for biasing spring of the catheter.
|出版ステータス||Published - 2000 1月 1|
|イベント||13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn|
継続期間: 2000 1月 23 → 2000 1月 27
|Other||13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)|
|Period||00/1/23 → 00/1/27|
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