Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micromachining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.
|ジャーナル||IEICE Transactions on Electronics|
|出版物ステータス||Published - 2001 1 1|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering