Basic studies of fiber-optic MEMS for telecommunication using three dimensional micromachining

Kazuhiro Hane, Minoru Sasaki, Jonghyeong Song, Yohei Taguchi, Kosuke Miura

研究成果: Article

抜粋

Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micromachining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.

元の言語English
ページ(範囲)1785-1791
ページ数7
ジャーナルIEICE Transactions on Electronics
E84-C
発行部数12
出版物ステータスPublished - 2001 1 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

フィンガープリント Basic studies of fiber-optic MEMS for telecommunication using three dimensional micromachining' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用