Basic research of vibration energy harvesting micro device using vinylidene fluoride / trifluoroethylene copolymer thin film

T. Takiguchi, T. Sasaki, Takashi Nakajima, S. Yamaura, T. Sekiguchi, S. Shoji

    研究成果: Conference article査読

    3 被引用数 (Scopus)

    抄録

    Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.

    本文言語English
    論文番号012030
    ジャーナルJournal of Physics: Conference Series
    557
    1
    DOI
    出版ステータスPublished - 2014
    イベント14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014 - Awaji Island, Hyogo, Japan
    継続期間: 2014 11 182014 11 21

    ASJC Scopus subject areas

    • 物理学および天文学(全般)

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