Ball surface acoustic wave hydrogen sensor with widest sensing range and fast response

Kazushi Yamanaka, T. Abe, N. Iwata, T. Tsuji, Tsuyoshi Mihara, Shingo Akao, K. Noguchi, N. Nakaso, D. Sim, N. Takeda, Y. Ebi, T. Fukiura, H. Tanaka

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

SAW(surface acoustic wave) excited on a spherical surface under a specific condition is naturally collimated, realizing ultra-multiple roundtrips along an equator of the sphere. The ball SAW hydrogen gas sensor is based on this newly discovered phenomenon, and uses a very thin Pd-Ni alloy sensitive film. The detection range for hydrogen gas was 10 ppm to 100 % and the response time was less than 1s for 3.0% hydrogen concentration in nitrogen gas, evaluated by using a newly developed digital quadrature detector (DQD).

本文言語English
ホスト出版物のタイトルTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ2549-2552
ページ数4
DOI
出版ステータスPublished - 2007 12月 1
イベント4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
継続期間: 2007 6月 102007 6月 14

出版物シリーズ

名前TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
国/地域France
CityLyon
Period07/6/1007/6/14

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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