Background gas analysis with leaky attenuation in a trace moisture analyzer using a ball surface acoustic wave sensor

Kazushi Yamanaka, Shingo Akao, Nobuo Takeda, Toshihiro Tsuji, Toru Oizumi, Hideyuki Fukushi, Tatsuhiro Okano, Yusuke Tsukahara

研究成果: Article査読

3 被引用数 (Scopus)

抄録

A method is described for background gas (BG) analysis in surface acoustic wave (SAW) gas sensors using two frequencies. The gas parameter G is defined as the square root of molecular weight times the ratio of specific heat at constant pressure to specific heat at constant volume, which is a representative property of BGs. In an experiment using varying BGs, the measured G values agreed with the true values. The concentrations of mixed BGs were successfully measured. This method will be useful in a trace moisture analyzer in natural gases and in the optimization of the purge process of glove boxes.

本文言語English
論文番号SGGB04
ジャーナルJapanese journal of applied physics
58
SG
DOI
出版ステータスPublished - 2019

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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