Bach fabrication of microlens at the end of optical fiber using self-photolithgraphy and etching techniques

Phan Ngoc Minh, Takahito Ono, Yoichi Haga, Kazumi Inoue, Minoru Sasaki, Kazuhiro Hane, Masayoshi Esashi

研究成果: Article査読

13 被引用数 (Scopus)

抄録

This paper describes a simple batch process for fabrication of microlens and microlens array at the end of an optical fiber or an optical fiber bundle using self-photolithography and etching techniques. A photoresist micro-cylinder was exactly formed at the core of the fiber end by exposing an UV light from the other end of the fiber and conventional development, rinse processes. A photoresist microlens was formed by thermal reflowing of the fiber at 170°C for 1 h. A measurement of transmissivity showed that the fabricated photoresist microlens is applicable for a wavelength that is longer than 450 nm. Alternatively, a glass microlens was fabricated at the core of the fiber by dry etching with an SF6 gas using the photoresist microlens as a mask. The focusing of the lensed fiber was confirmed and simulation work showed that the lensed fiber could focus the light with a beam spot of 2 μm. numerical aperture (NA) of 0.285 and a depth of focus of 16 μm.

本文言語English
ページ(範囲)150-154
ページ数5
ジャーナルOptical Review
10
3
DOI
出版ステータスPublished - 2003 1 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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