The surface structure of SrTiO3(001) thin films homoepitaxially grown in step-flow mode by pulsed laser deposition was characterized using scanning tunneling microscopy. One-dimensional (1D) TiOx -based nanostructures were formed on the surface, and their density increased with increasing film thickness. Most of the 1D nanostructures disappeared after post-deposition annealing, and the resulting surface exhibited a domain structure with (2 × 1) and (1 × 2) reconstructions and fewer oxygen vacancies. These results imply that the step-flow growth is likely to produce a TiOx -rich surface and Ti deficiencies in the film, and that annealing can effectively reduce the density of atomic defects.
ASJC Scopus subject areas
- Physics and Astronomy(all)