Atomically Controlled Processing for Future Si-Based Devices

Junichi Murota, Masao Sakuraba, Bernd Tillack

研究成果: Chapter

本文言語	English
ホスト出版物のタイトル	Future Trends in Microelectronics
ホスト出版物のサブタイトル	Up the Nano Creek
出版社	John Wiley & Sons, Inc.
ページ	246-258
ページ数	13
ISBN（印刷版）	9780470081464
DOI	https://doi.org/10.1002/9780470168264.ch22
出版ステータス	Published - 2007 1月 22
外部発表	はい

ASJC Scopus subject areas

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